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Ryzhova O.G., Grigoryev A.A., Storozhenko P.А., Polivanov A.N., Zhukova S.V., Shulyatyeva T.I., Timofeev I.A., Bogachev Е.А. Preceramic monomers for silicon carbonitride and nitride production by means of chemical vapor deposition. Fine Chemical Technologies. 2012;7(2):51-57. (In Russ.)

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ISSN 2410-6593 (Print)
ISSN 2686-7575 (Online)