Preceramic monomers for silicon carbonitride and nitride production by means of chemical vapor deposition
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Abstract
Keywords
547.253+547.44+546.287
About the Authors
O. G. RyzhovaRussian Federation
A. A. Grigoryev
Russian Federation
P. А. Storozhenko
Russian Federation
A. N. Polivanov
Russian Federation
S. V. Zhukova
Russian Federation
T. I. Shulyatyeva
Russian Federation
I. A. Timofeev
Russian Federation
Е. А. Bogachev
Russian Federation
References
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2. Ryzhova O.G., Polivanov A.N., Storozhenko P.A., Timofeev I.A. Precursors of silazanes class and methods of composites manufacture based on silicon nitride, silicon curbonitride // Abstr. of the 15th Int. Symp. on Organosilicon Chemistry. - Jeju, Korea, August 1-6, 2008. P159. P. 191.
3. Ryzhova O.G., Grigor'ev A.A., Storozhenko P.A., Polivanov A.N., Zhukova S.V. Issle-dovanie metiltsiklosilazanov metodom spektroskopii YaMR 29Si, 1H // Sb. tezisov dokladov III molodezhnoi nauchno-tekhn. konf. «Naukoemkie khimicheskie tekhnologii-2009». - Moskva, 13-14 noyabrya 2009. S. 12.
4. Ryzhova O.G., Pankov K.A., Storozhenko P.A., Polivanov A.N., Timofeev I.A., Bogachev E.A. Preceramic monomers for coating on the basis of silicon nitride, produced by CVD method // Abstr. of the 5th Eur. Organosilicon Days. - Vienna, September 2009. P. 184.
5. Yu Ga-Er., Parrick J., Edirisinghe M., Ralph B. Synthesis of silicon oxynitride from a polymeric precursor // J. Mater. Sci. 1994. V. 29. P. 1680-1685.
6. Seyferth D., Wiseman G. H. Polysilazane routes to silicon nitride // Polym. Prepr. 1984. V. 25. P. 10-12.
7. Semenova E.A., Zhinkin D.Ya., Andrianov K.A. Reaktsiya dialkildikhlorsilanov i alkildikhlorsilanov s metilaminom // Izv. AN SSSR. Cer. khim. 1962. № 10. S. 2036-2039.
8. Potapov V.M. Stereokhimiya: uchebn. posobie dlya vuzov / 2-e izd., pererab. i dop. - M.: Khimiya, 1988. 464 s.
9. Zhinkin D.Ya., Semenova E.A., Sobolevskii M.V., Andrianov K.A. Prevrashchenie alkiltsiklo-silazanov pri povyshennykh temperaturakh // Elementoorgan. soed. 1963. № 12. S. 16-17.
Review
For citations:
Ryzhova O.G., Grigoryev A.A., Storozhenko P.А., Polivanov A.N., Zhukova S.V., Shulyatyeva T.I., Timofeev I.A., Bogachev Е.А. Preceramic monomers for silicon carbonitride and nitride production by means of chemical vapor deposition. Fine Chemical Technologies. 2012;7(2):51-57. (In Russ.)
ISSN 2686-7575 (Online)