For citations:
Artamonov A.V., Astakhov V.P., Karpov V.V., Maximov A.D. Pulsed photon annealing of Ве+-implanted InSb layers. Fine Chemical Technologies. 2012;7(3):46-50. (In Russ.)
Artamonov A.V., Astakhov V.P., Karpov V.V., Maximov A.D. Pulsed photon annealing of Ве+-implanted InSb layers. Fine Chemical Technologies. 2012;7(3):46-50. (In Russ.)