Pulsed photon annealing of Ве + -implanted InSb layers

A. V. Artamonov; V. P. Astakhov; V. V. Karpov; A. D. Maximov

Fine Chemical Technologies
Tonkie Khimicheskie Tekhnologii

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ISSN 2410-6593 (Print)
ISSN 2686-7575 (Online)

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Artamonov A.V., Astakhov V.P., Karpov V.V., Maximov A.D. Pulsed photon annealing of Ве⁺-implanted InSb layers. Fine Chemical Technologies. 2012;7(3):46-50. (In Russ.)

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ISSN 2410-6593 (Print)
ISSN 2686-7575 (Online)

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