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Shelonin E.A., Kort A.M., Yakovenko A.G., Gvelesiani A.A., Abramova E.N. Specific features of electrochemical polishing etch of single crystal silicon in a non-oxidizing etching agent. Fine Chemical Technologies. 2012;7(4):84-87. (In Russ.)

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ISSN 2410-6593 (Print)
ISSN 2686-7575 (Online)