For citations:
Gorskiy A.A., Berliner L.B., Titova E.V. CALCULATION OF GROWTH RATES AND COMPOSITIONS OF NANOLAYERS InXGa1-XAs ON A InP SUBSTRATE USING A 3D MODEL OF A HORIZONTAL MOVPE REACTOR. Fine Chemical Technologies. 2013;8(4):85-91. (In Russ.)
Gorskiy A.A., Berliner L.B., Titova E.V. CALCULATION OF GROWTH RATES AND COMPOSITIONS OF NANOLAYERS InXGa1-XAs ON A InP SUBSTRATE USING A 3D MODEL OF A HORIZONTAL MOVPE REACTOR. Fine Chemical Technologies. 2013;8(4):85-91. (In Russ.)