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Gorskiy A.A., Berliner L.B., Titova E.V. CALCULATION OF GROWTH RATES AND COMPOSITIONS OF NANOLAYERS InXGa1-XAs ON A InP SUBSTRATE USING A 3D MODEL OF A HORIZONTAL MOVPE REACTOR. Fine Chemical Technologies. 2013;8(4):85-91. (In Russ.)

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ISSN 2410-6593 (Print)
ISSN 2686-7575 (Online)