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Marmalyuk A.A., Arbenin D.E., Burlyaeva E.V. The algorithmic programs for optimal growth conditions selection in growing of GaAs-based epitaxial layers by MOCVD. Fine Chemical Technologies. 2009;4(2):61-66. (In Russ.)

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ISSN 2410-6593 (Print)
ISSN 2686-7575 (Online)