For citations:
Arbenina V.V., Akchurin R.Kh., Berliner L.B. Computer modeling of processes of semiconductor technology through information-calculating system. Fine Chemical Technologies. 2015;10(3):70-76. (In Russ.)
Arbenina V.V., Akchurin R.Kh., Berliner L.B. Computer modeling of processes of semiconductor technology through information-calculating system. Fine Chemical Technologies. 2015;10(3):70-76. (In Russ.)