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Computer modeling of processes of semiconductor technology through information-calculating system

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Abstract

An information-calculating system (ICS) that allows computer simulation of processes of semiconductor technology associated with the formation of single crystals and epitaxial heterostructures based on semiconductor AIIIBV compounds was developed. The ICS database covers 9 of AIIIBV compounds and solid solutions based on semiconductor AIIIBV compounds in 18 ternary and 15 four-component systems. The ICS allows solving problems related to the calculation of heterogeneous equilibria in these systems, stability of the formed solid solutions to decay, kinetics of epitaxial growth of heterostructures and non-equilibrium phenomena accompanying heteroepitaxy. In order to create the ICS, we used object-oriented programming Object Windows application programs compiled in the programming language Borland C++ in the Windows environment. Examples of the use of the database for particular semiconductor systems are presented.The above list of problems could be solved with the use of the ICS. The ICS can be used both in research and in educational practice.

About the Authors

V. V. Arbenina
M.V. Lomonosov Moscow State University of Fine Chemical Technologies, 86, Vernadskogo pr., Moscow 119571
Russian Federation


R. Kh. Akchurin
M.V. Lomonosov Moscow State University of Fine Chemical Technologies, 86, Vernadskogo pr., Moscow 119571
Russian Federation


L. B. Berliner
M.V. Lomonosov Moscow State University of Fine Chemical Technologies, 86, Vernadskogo pr., Moscow 119571
Russian Federation


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For citation:


Arbenina V.V., Akchurin R.K., Berliner L.B. Computer modeling of processes of semiconductor technology through information-calculating system. Fine Chemical Technologies. 2015;10(3):70-76. (In Russ.)

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ISSN 2410-6593 (Print)
ISSN 2686-7575 (Online)