Computer modeling of processes of semiconductor technology through information-calculating system

V. V. Arbenina; R. Kh. Akchurin; L. B. Berliner

Fine Chemical Technologies
Tonkie Khimicheskie Tekhnologii

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ISSN 2686-7575 (Online)

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Arbenina V.V., Akchurin R.K., Berliner L.B. Computer modeling of processes of semiconductor technology through information-calculating system. Fine Chemical Technologies. 2015;10(3):70-76. (In Russ.)

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ISSN 2410-6593 (Print)
ISSN 2686-7575 (Online)

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Alla K. Frolkova

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About the Authors

V. V. Arbenina
M.V. Lomonosov Moscow State University of Fine Chemical Technologies, 86, Vernadskogo pr., Moscow 119571
Russian Federation

Кафедра материаловедения и технологии функциональных материалов и структур, доцент

R. Kh. Akchurin
M.V. Lomonosov Moscow State University of Fine Chemical Technologies, 86, Vernadskogo pr., Moscow 119571
Russian Federation

Кафедра материаловедения и технологии функциональных материалов и структур, профессор

L. B. Berliner
M.V. Lomonosov Moscow State University of Fine Chemical Technologies, 86, Vernadskogo pr., Moscow 119571
Russian Federation

Кафедра материаловедения и технологии функциональных материалов и структур, ведущий научный сотрудник

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