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Mirofyanchenko A.E., Kashuba A.S., Pryanikova E.V., Yakovleva N.I., Arbenina V.V. High-resolution microscopy methods for surface morphology semiconductors investigation. Fine Chemical Technologies. 2015;10(6):37-43. (In Russ.)

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ISSN 2410-6593 (Print)
ISSN 2686-7575 (Online)