Оксинитриды алюминия, легированные ионами редкоземельных и переходных металлов

Цели. Обобщить результаты исследований и сформулировать основные закономерности влияния ионов редкоземельных (РЗМ) и переходных металлов (ПМ) на формирование, фазовый состав и оптические свойства оксинитрида алюминия (алона).

Результаты. Проведен анализ литературных данных, включая результаты собственных исследований авторов, касающихся алонов, легированных ионами РЗМ и ПМ. Рассмотрено влияние добавок РЗМ и ПМ на формирование алона и его фазовый состав и оптические свойства.

Выводы. Установлено, что введение ионов РЗМ и ПМ способствует образованию фазы алона при высокотемпературном синтезе из оксида и нитрида алюминия. Оксинитридная матрица проявляет восстановительные свойства как в отношении РЗМ, так и ПМ. Легирование ионами РЗМ приводит к получению материалов, обладающих люминесцентными свойствами в видимом диапазоне. Легирование ионами ПМ влияет на ширину запрещенной зоны алона как полупроводника. Пределы растворимости всех металлов в матрице алона не превышают 1–2 ат. % относительно алюминия. Концентрационное тушение люминесценции наблюдается при содержании РЗМ от 0.1 до 0.5 ат. %.

1. Абызов А.М. Оксид алюминия и алюмооксидная керамика (Обзор). Часть 1. Свойства Al2O3 и промышленное производство дисперсного Al2O3. Новые огнеупоры. 2019;1: 16–23. https://doi.org/10.17073/1683-4518-2019-1-16-23

2. Yamaguchi G., Yanagida H. Study on the reductive spinel – a new spinel formula AlN–Al2O3 instead of the previous one Al3O4. Bull. Chem. Soc. Jap. 1959;32(11):1264–1265. https://doi.org/10.1246/bcsj.32.1264

3. McCauley J.W. A simple model for aluminum oxynitride spinels. J. Am. Ceram. Soc. 1978;61(7–8):372–373. https://doi.org/10.1111/j.1151-2916.1978.tb09336.x

4. McCauley J.W., Corbin N.D. Phase relations and reaction sintering of transparent cubic aluminum oxynitride spinel (ALON). J. Am. Ceram. Soc. 1979;62(9–10):476–479. https://doi.org/10.1111/j.1151-2916.1979.tb19109.x

5. McCauley J.W., Patel P., Chen M., Gilde G., Strassburger E., Paliwal B., Dandekar D.P. ALON: a brief history of its emergence and evolution. J. Eur. Ceram. Soc. 2009;29(2): 223–236. https://doi.org/10.1016/j.jeurceramsoc.2008.03.046

6. McCauley J.W., Corbin N.D. High Temperature Reactions and Microstructures in the Al2O3-AlN System. In: Riley F.L. (Ed.). Progress in Nitrogen Ceramics. NATO ASI Series. Springer; 1983. V. 65. P. 111–118. https://doi.org/10.1007/978-94-009-6851-6_8

7. Batyrev I.G., Taylor D.E., Gazonas G.A., McCauley J.W. Density functional theory and evolution algorithm calculations of elastic properties of AlON. J. Appl. Phys. 2014;115(2):023505. https://doi.org/10.1063/1.4859435

8. Swab J.J., LaSalvia J.C., Gilde G.A., Patel P.J., Motyka M.J. Transparent armor ceramics: Alon and spinel. Ceram. Eng. Sci. Proc. 1999;20(4):79–84. https://doi.org/10.1002/9780470294574.ch10

9. Maguire E.A., Rawson J.K., Tustison R.W. Aluminum oxynitride’s resistance to impact and erosion. In: SPIE’s 1994 Int. Symposium on Optics, Imaging, and Instrumentation. Proc. SPIE. 1994;2286:26–32. https://doi.org/10.1117/12.187372

10. Kargin Yu.F., Akhmadullina N.S., Solntsev K.A. Ceramic Materials and Phosphors Based on Silicon Nitride and SiALON. Inorg. Mater. 2014;50(13):1325–1342. https://doi.org/10.1134/S0020168514130032

11. Shang M., Geng D., Yang D., Kang X., Zhang Y., Lin J. Luminescence and energy transfer properties of Ca2Ba3(PO4) 3Cl and Ca2Ba3(PO4)3Cl:A (A = Eu2+/Ce3+/Dy3+/Tb3+) under UV and low-voltage electron beam excitation. Inorg. Chem. 2013;52(6):3102–3112. https://doi.org/10.1021/ic3025759

12. Liu H., Luo Y., Mao Z., Liao L., Xia Z. A novel single-composition trichromatic white-emitting Sr3.5Y6.5O2(PO4)1.5(SiO4)4.5: Ce3+/Tb3+/Mn2+phosphor: synthesis, luminescent properties and applications for white LEDs. J. Mater. Chem. C. 2014;2(9):1619–1627. https://doi.org/10.1039/C3TC32003K

13. Lin C.C., Liu R.S. Advances in phosphors for light-emitting diodes. J. Phys. Chem. Lett. 2011;2(11):1268–1277. https://doi.org/10.1021/jz2002452

14. Yamamoto H. White LED phosphors: the next step. Proc. SPIE. 2010;7598:08–14. https://doi.org/10.1117/12.843536

15. Bachmann V., Ronda C., Meijerink A. Temperature quenching of yellow Ce3+ luminescence in YAG:Ce. Chem. Mater. 2009;21(10):2077–2084. http://dx.doi.org/10.1021/cm8030768

16. Setlur A.A. Phosphors for LED-based solid-state lighting. Electrochem. Soc. Interface. 2009;18(4):32–36. http://dx.doi.org/10.1149/2.F04094IF

17. Xia Z.G., Wang X.M., Wang Y.X., Liao L.B., Jing X.P. Synthesis, structure, and thermally stable luminescence of Eu2+-doped Ba2Ln(BO3)2Cl (Ln = Y, Gd and Lu) host compounds. Inorg. Chem. 2011;50(20):10134–10142. https://doi.org/10.1021/ic200988w

18. Zhu G., Wang Y., Ci Z., Liu B., Shi Y., Xin S. Ca5 La5 (SiO4 ) 3 (PO4 ) 3 O2 : Ce3+,Mn2+: A color-tunable phosphor with efficient energy transfer for white light-emitting diodes. J. Electrochem. Soc. 2011;158:J236–J242. https://doi.org/10.1149/1.3595434

19. Fukuyama H., Nakao W., Susa M., Nagata K. New synthetic method of forming aluminum oxynitride by plasma arc melting. J. Am. Ceram. Soc. 1999;82(6):1381–1387. https://doi.org/10.1111/j.1151-2916.1999.tb01927.x

20. Rafaniello W., Cutler I.B. Preparation of sinterable cubic aluminum oxynitride by the carbothermal nitridation of aluminum-oxide. J. Am. Ceram. Soc. 1981;64(10):128–C128. https://doi.org/10.1111/j.1151-2916.1981.tb10232.x

21. Zientara D., Bućko M.M., Lis J. ALON-based materials prepared by SHS technique. J. Eur. Ceram. Soc. 2007;27(2–3): 775–779. https://doi.org/10.1016/j.jeurceramsoc.2006.04.008

22. Wang S.F., Zhang J., Luo D.W., Gua F., Tang D.Y., Dong Z.L., Kong L.B. Transparent ceramics: Processing, materials and applications. Prog. Sol. State Chem. 2013;41:20–54. https://doi.org/10.1016/j.progsolidstchem.2012.12.002

23. Patel P.J., Gilde G., McCauley J.W. The role of gas pressure in transient liquid phase sintering of aluminum oxynitride (Alon). Cer. Eng. Sci. Proc. 2003;24(3):425–431. https://doi.org/10.1002/9780470294802.ch61

24. Martin C., Cales B. Synthesis and Hot Pressing Of Transparent Aluminum Oxynitride. In: SPIE 1989 Technical Symposium on Aerospace Sensing. Proc. SPIE; 1989. V. 1112. P. 20–24. https://doi.org/10.1117/12.960759

25. Jin X., Gao L., Sun J., Liu Y., Gui L. Highly Transparent AlON Pressurelessly Sintered from Powder Synthesized by a Novel Carbothermal Nitridation Method. J. Am. Ceram. Soc. 2012;95(9): 2801–2807. https://doi.org/10.1111/j.1551-2916.2012.05253.x

26. Wang J., Zhang F., Chen F., Zhang J., Zhang H., Tian R., Wang Z., Liu J., Zhang Z., Chen S., Wang S. Effect of Y2O3 and La2O3 on the sinterability of γ-AlON transparent ceramics. J. Eur. Ceram. Soc. 2015;35(1):23–28. https://doi.org/10.1016/j.jeurceramsoc.2014.07.016

27. Tsukuma K. Transparent MgAl2O4 Spinel Ceramics Produced by HIP Post-Sintering. J. Ceram. Soc. Jap. 2006;114(1334): 802–806. https://doi.org/10.2109/jcersj.114.802

28. Chen F., Zhang F., Wang J., Zhang H., Tian R., Zhang J., Zhang Z., Sun F., Wang S. Microstructure and optical properties of transparent aluminum oxynitride ceramics by hot isostatic pressing. Scripta Mater. 2014;81:20–23. https://doi.org/10.1016/j.scriptamat.2014.02.009

29. Chen F., Zhang F., Wang J., Zhang H., Tian R., Zhang Z., Wang S. Hot isostatic pressing of transparent AlON ceramics with Y2O3/La2O3 additives. J. Alloys Compd. 2015;650: 753–757. https://doi.org/10.1016/j.jallcom.2015.08.028

30. Zhang J., Lei J., Shi Y., Xie J., Lei F., Zhang L. Effect of Y2O3, La2O3 and MgO Co-Doping on Densification, Microstructure and Properties of AlON Ceramics. J. Ceram. Sci. Tech. 2017;8(1):177–182. https://dx.doi.org/10.4416/JCST2016-00114

31. DongQ., YangF., CuiJ., TianY., LiuS., DuF., PengJ., YeX. Enhanced narrow green emission and thermal stability in γ-AlON:Mn2+,Mg2+ phosphor via charge compensation. Ceram. Int. 2019;45(9): 11868–11875. https://doi.org/10.1016/j.ceramint.2019.03.069

32. Thi M.H.N., Le P.X. Utilizing a strait-range green phosphor γ-AlON: Mn,Mg for the task of achieving a super-broad hue gamut display. Indones. J. Electr. Eng. Comput. Sci. 2022;27(2): 748–753. http://doi.org/10.11591/ijeecs.v27.i2.pp748-753

33. Kikkawa S., Hatta N., Takeda T. Preparation of Aluminum Oxynitride by Nitridation of a Precursor Derived from Aluminum–Glycine Gel and the Effects of the Presence of Europium. J. Am. Ceram. Soc. 2008;91(3):924–928. https://doi.org/10.1111/j.1551-2916.2007.02213.x

34. Yin L., Xu X., Hao L., Xie W., Wang Y., Yang L., Yang X. Synthesis and photoluminescence of Eu2+–Mg2+ co-doped γ-AlON phosphors. Mater. Lett. 2009;63(17):1511–1513. https://doi.org/10.1016/j.matlet.2009.04.002

35. Zhang F., Chen S., Chen J.F., Zhang H.L., Li J., Liu X.J., Wang S.W. Characterization and luminescence properties of AlON:Eu2+ phosphor for white-emitting-diode illumination. J. Appl. Phys. 2012;111(8):083532. https://doi.org/10.1063/1.4705404

36. Zhang L., Luo H., Zhou L., Liu Q., Li J., Zhang W. Preparation of γ-aluminum oxynitride phosphor with Eu doping by direct nitridation in ammonia and postannealing. J. Am. Ceram. Soc. 2018;101(8):3299–3308. https://doi.org/10.1111/jace.15494

37. Akhmadullina N.S., Lysenkov A.S., Ashmarin A.A., BaranchikovA.E., IshchenkoA.V., YagodinV.V., Shul’ginB.V., Kargin Yu.F. Synthesis and luminescence properties of Eu2+- and Ce3+-doped AlONs. Ceram. Int. 2016;42(1):286–293. https://doi.org/10.1016/j.ceramint.2015.08.107

38. Ахмадуллина Н.С., Ищенко А.В., Ягодин В.В., Лысенков А.С., Сиротинкин В.П., Каргин Ю.Ф., Шульгин Б.В. Синтез и люминесцентные свойства оксинитрида алюминия, активированного ионами Tb3+. Неорган. матер. 2019;55(12):1298–1304. https://doi.org/10.1134/S0002337X19120017

39. Akhmadullina N.S., Ishchenko A.V., Lysenkov A.V., Shishilov O.N., Kargin Yu.F. Synthesis and luminescence properties of Eu2+/Ce3+, Ce3+/Tb3+ and Eu2+/Tb3+ co-doped AlONs. J. Alloys Compd. 2021;887:161410. https://doi.org/10.1016/j.jallcom.2021.161410

40. Zorenko Y., Zorenko T., Voznyak T., Mandowski A., Xia Q., Batentschuk M., Friеdrich J. Luminescence of F+ and F centers in Al2O3-Y2O3 oxide compounds. IOP Conf. Ser.: Mater. Sci. Eng. 2010;15:012060. http://dx.doi.org/10.1088/1757-899X/15/1/012060

41. Trinkler L., Berzina B. Localised transitions in luminescence of AlN ceramics. Radiat. Meas. 2014;71:232–236. https://doi.org/10.1016/j.radmeas.2014.02.016

42. Weinstein I.A., Vokhmintsev A.S., Spiridonov D.M. Thermoluminescence kinetics of oxygen-related centners in AlN single crystals. Diam. Relat. Mater. 2012;25:59–62. https://doi.org/10.1016/j.diamond.2012.02.004

43. Zhang X., Li Z., Zeng Q. First-principles calculation on the electronic structure and optical properties of Eu2+ doped γ-AlON phosphor. Ceram. Int. 2018;44(2):1461–1466. https://doi.org/10.1016/j.ceramint.2017.10.044

44. FrenchR.H. Electronic band structure of Al2O3, with comparison to AlON and AIN. J. Am. Ceram. Soc. 1990;73(3):477–489. https://doi.org/10.1111/j.1151-2916.1990.tb06541.x

45. Thomas M.E., Tropf W.J., Gilbert S.L. Vacuum-ultraviolet characterization of sapphire ALON, and spinel near the band gap. Opt. Eng. 1993;32(6):1340–1343. https://doi.org/10.1117/12.135837

46. Chen C.-F., Yang P., King G., Tegtmeier E.L. Processing of Transparent Polycrystalline AlON:Ce3+ Scintillators. J. Am. Ceram. Soc. 2016;99(2):424–430. https://doi.org/10.1111/jace.13986

47. Hu W.-W., Zhu Q.-Q., Hao L.-Y., Xu X., Agathopoulos S. Luminescence properties and energy transfer in Al5O6N:Ce3+,Tb3+ phosphors. J. Luminesc. 2014;149:155–158. https://doi.org/10.1016/j.jlumin.2014.01.010

48. Cavalli E., Boutinaud P., Mahiou R., Bettinelli M., Dorenbos P. Luminescence Dynamics in Tb3+-Doped CaWO4 and CaMoO4 Crystals. Inorg. Chem. 2010;49(11):4916–4921. https://doi.org/10.1021/ic902445c

49. Baklanova Y.V., Maksimova L.G., Denisova T.A., Tyutyunnik A.P., Zubkov V.G. Synthesis and Luminescence Properties of Tb3+ and Dy3+ Doped Li7La3Hf2O12 with Tetragonal Garnet Structure. Opt. Mater. 2019;87:122–126. https://doi.org/10.1016/j.optmat.2018.04.041

50. Han B., Liang H., HuangY., TaoY., Su Q. Vacuum Ultraviolet− Visible Spectroscopic Properties of Tb3+ in Li(Y,Gd)(PO3) 4: Tunable Emission, Quantum Cutting, and Energy Transfer. J. Phys. Chem. C. 2010;114(14):6770–6777. https://doi.org/10.1021/jp100755d

51. Zhang F., Wang S.W., Liu X.J., An L.Q., Yuan X.Y. Upconversion luminescence in Er-doped g-AlON ceramic phosphors. J. Appl. Phys. 2009;105(9):093542. https://doi.org/10.1063/1.3125516

52. Zhang F., Chen S., Zhang H.L., LiJ., YangY., Zhou G.H., Liu X.J., WangS.W. Upconversion Luminescence of γ-AlON:Er3+ Phosphors with Mg2+ Co-Doping. J. Am. Ceram. Soc. 2012;95(1):27–29. https://doi.org/10.1111/j.1551-2916.2011.04916.x

53. Wang Y., Xie X., Qi J., Wang S., Wei N., Lu Z., Chen X., Lu T. Bifunctional behavior of Er3+ ions as the sintering additive and the fluorescent agent in Er3+ single doped γ-AlON transparent ceramics. J. Luminsc. 2016;175:203–206. https://doi.org/10.1016/j.jlumin.2016.02.039

54. Tsabit A.M., Kim M.-D., Yoon D.-H. Effects of various rareearth additives on the sintering and transmittance of γ-AlON. J. Eur. Ceram. Soc. 2020;40(8):3235–3243. https://doi.org/10.1016/j.jeurceramsoc.2020.03.027

55. Tsabit A.M., Chung W.J., Lee H., Yoon D.-H. Fabrication and photoluminescence of γ-AlON:Sm and Yb. J. Am. Ceram. Soc. 2022;42(4):1348–1353. https://doi.org/10.1016/j.jeurceramsoc.2021.12.015

56. Liu R.S., Liu Y.H., Bagkar N.C., Hu S.F., Enhanced luminescence of SrSi2O2N2:Eu2+ phosphors by codoping with Ce3+, Mn2+, and Dy3+ ions. Appl. Phys. Lett. 2007;91(6):061119. http://dx.doi.org/10.1063/1.2768916

57. Song X., Fu R., Agathopoulos S., He H., Zhao X., Li R., Luminescence and energy transfer mechanism in SrSi2O2N2:Ce3+, Eu2+ phosphors for white LEDs. J. Electrochem. Soc. 2010;157(2):J34–J38. https://doi.org/10.1149/1.3270491

58. Jian X., Wang H., Lee M.-H., Tian W., Chen G.-Z., Chen W.-Q., Ji W.-W., Xu X., Yin L.-J. Insight the Luminescence Properties of AlON: Eu, Mg Phosphor under VUV Excitation. Mater. 2017;10(7):723. https://doi.org/10.3390/ma10070723

59. DengL., LeiJ., ShiY., LinT., RenY., Xie J., Photoluminescence of Tb3+/Ce3+ co-doped aluminum oxynitride powders. Mater. Lett. 2011;65(4):769–771. https://doi.org/10.1016/j.matlet.2010.11.027

60. Wu Q., Li Y., Wang X., Zhao Z., Wang C., Li H., Mao A., Wang Y. Novel optical characteristics of Eu2+ doped and Eu2+, Ce3+ co-doped LiSi2N3 phosphors by gas-pressed sintering. RSC Adv. 2014;4(73):39030–39036. https://doi.org/10.1039/C4RA05502K

61. Chen L., Du F., Liang Y., Zhu Y., Xiao Y., Peng J. A study on photoluminescence and energy transfer of γ-AlON:Ce3+,Eu2+ phosphors for application in full-visible-spectrum LED lighting. Displays. 2022;71:102147. https://doi.org/10.1016/j.displa.2021.102147

62. Zhang J., Ma C., Wen Z., Du M., Long J., Ma R., Yuan X., Li J., Cao Y. Photoluminescence and energy transfer properties of Eu2+ and Tb3+ co-doped gamma aluminum oxynitride powders. Opt. Mater. 2016;58:290–295. https://doi.org/10.1016/j.optmat.2016.05.048

63. Xie R.-J., Hirosaki N., Liu X.-J., Takeda T., Li H.-L. Crystal Structure and Photoluminescence of Mn2+, Mg2+ Codoped Gamma Aluminum Oxynitride (γ-AlON): A Promising Green Phosphor for White Light-Emitting Diode. Appl. Phys. Lett. 2008;92(20):201905. https://doi.org/10.1063/1.2920190

64. Kitaura M., Harima A., Xie R.-J., Takeda T., Hirosaki N., OhnishiA., Sasaki M. Electron Spin Resonance Study on Local Structure of Manganese Ions Doped in Gamma-Aluminum Oxynitride Phosphors. J. Light & Vis. Env. 2012;36(1):6–9. https://doi.org/10.2150/jlve.36.6

65. HaoL., MiaoX., LiK., ZhongJ., TuB., YangZ., WangH. Structural and Luminescent Properties of Mg0.25−x Al2.57O3.79N0.21:xMn2+ Green-Emitting Transparent Ceramic Phosphor. J. Wuhan Univ. Technol.-Mat. Sci. Edit. 2024;39(3):533–540. https://doi.org/10.1007/s11595-024-2909-3

66. Zhou X., Chen S., Zhang C., Huang X., Lu K., Qi L., Lu T. Mn2+/Mg2+ co-doped AlON ceramic with ultra-narrowband green emission combining high transparency toward a wide gamut backlight application. Opt. Lett. 2024;49(9): 2245–2248. https://doi.org/10.1364/OL.520495

67. Liu L., Zhang J., Wang X., Hou W., Liu X., Xu M., Yang J., Liang B. Preparation and fluorescence properties of a Cr3+:g-AlON powder by high temperature solid state reaction. Mater. Lett. 2020;258:126811. https://doi.org/10.1016/j.matlet.2019.126811

68. Ishchenko A.V., Akhmadullina N.S., Leonidov I.I., Sirotinkin V.P., Skvortsova L.G., Shishilov O.N., Zhidkov I.S., Kukharenko A.I., Kargin Yu.F. Synthesis and spectroscopic properties of aluminum oxynitride doped with 3d-metal ions: The case of γ-AlON:Ti. J. Alloys Compd. 2023;934:167792. https://doi.org/10.1016/j.jallcom.2022.167792

69. Ishchenko A.V., Akhmadullina N.S., Leonidov I.I., Sirotinkin V.P., Skvortsova L.G., Mandrygina D.A., Shishilov O.N., Zhidkov I.S., KukharenkoA.I., Weinstein I.A., Kargin Yu.F. Synthesis, phase composition, electronic and spectroscopic properties of cobalt-doped aluminum oxynitride. Physica B: Condens. Matter. 2024;695:416593. https://doi.org/10.1016/j.physb.2024.416593

70. Ищенко А.В., Ахмадуллина Н.С., Пастухов Д.А., Леонидов И.И., Сиротинкин В.П., Лысенков А.С., Шишилов О.Н., Каргин Ю.Ф. Фазовый состав и оптические свойства оксинитрида алюминия, легированного железом. Неорган. матер. 2024;60(3):322–330.

71. Kubelka P., Munk F. Ein beitrag zur optik der farbanstriche. Z. Tech. Phys. 1931;12:593–601.

72. Du X., Yao S., Jin X., Chen H., LiW., Liang B. Radiation damage and luminescence properties of gamma aluminum oxynitride transparent ceramic. J.Phys.D.: Appl. Phys. 2015;48(34):345104. https://doi.org/10.1088/0022-3727/48/34/345104

73. Tauc J. Optical properties and electronic structure of amorphous Ge and Si. Mater. Res. Bull. 1968;3(1):37–46. https://doi.org/10.1016/0025-5408(68)90023-8

74. Xu J., Cherepy N.J., Ueda J., Tanabe S. Red persistent luminescence in rare earth- free AlN:Mn2+ phosphor. Mater. Lett. 2017;206:175–177. https://doi.org/10.1016/j.matlet.2017.07.015

75. Zorenko Y., Zorenko T., Voznyak T., Nizhankovskiy S., Krivonosov E., Danko A., Puzikov V., Comparative study of the luminescence of Al2O3:Ti and Al2O3 crystals under VUV synchrotron radiation excitation. Opt. Mater. 2013;35(12): 2053–2055. https://doi.org/10.1016/j.optmat.2012.10.044

76. Gaffney E.S. Spectra of tetrahedral Fe2+ in MgAl2O4. Phys. Rev. B. 1973;8:3484–3486. https://doi.org/10.1103/PhysRevB.8.3484

77. Basyrova L., Bukina V., Balabanov S., Belyaev A., Drobotenko V., Dymshits O., Alekseeva I., Tsenter M., Zapalova S., Khubetsov A., Zhilin A., Volokitina A., Vitkin V., Mateos X., Serres J.M., Camy P., Loiko P. Synthesis, structure and spectroscopy of Fe2+:MgAl2O4 transparent ceramics and glass-ceramics. J. Lumin. 2021;236:118090. https://doi.org/10.1016/j.jlumin.2021.118090

78. Thi Le T.-L., Nguyen L.T., Nguyen H.-H., Van Nghia N., Vuong N.M., Hieu H.N., Van Thang N., Le V.T., Nguyen V.H., Lin P.-C., Yadav A., Madarevic I., Janssens E., Van Bui H., Ngoc L.L.T. Titanium nitride nanodonuts synthesized from natural ilmenite ore as a novel and efficient thermoplasmonic material. Nanomaterials. 2021;11(1):76. https://doi.org/10.3390/nano11010076

79. Taborda J.A.P., Landázuri H.R., Londoño L.P.V. Correlation Between Optical, Morphological, and Compositional Properties of Aluminum Nitride Thin Films by Pulsed Laser Deposition. IEEE Sens. J. 2016;16(2):359–364. https://doi.org/10.1109/JSEN.2015.2466467

80. Prieto P., Kirby R.E. X-ray photoelectron spectroscopy study of the difference between reactively evaporated and direct sputter-deposited TiN films and their oxidation properties. J. Vac. Sci. Technol. A. 1995;13(6):2819–2826. https://doi.org/10.1116/1.579711